Fabrication Of 3d Solenoid Microcoils In Silica Glass By Femtosecond Laser Wet Etch And Microsolidics

xiangwei meng,qing yang,feng chen,chao shan,keyin liu,yanyang li,hao bian,guangqing du,xun hou

DOI: https://doi.org/10.1117/12.2075880

2015-01-01

Abstract:This paper reports a flexible fabrication method for 3D solenoid microcoils in silica glass. The method consists of femtosecond laser wet etching (FLWE) and microsolidics process. The 3D microchannel with high aspect ratio is fabricated by an improved FLWE method. In the microsolidics process, an alloy was chosen as the conductive metal. The microwires are achieved by injecting liquid alloy into the microchannel, and allowing the alloy to cool and solidify. The alloy microwires with high melting point can overcome the limitation of working temperature and improve the electrical property. The geometry, the height and diameter of microcoils were flexibly fabricated by the pre-designed laser writing path, the laser power and etching time. The 3D microcoils can provide uniform magnetic field and be widely integrated in many magnetic microsystems.