Cnts/Cu Composite Thin Films Fabricated By Electrophoresis And Electroplating Techniques

Ping Liu,Jiahao Wu,Dong Xu,Yuanzhi Pan,Chang You,Yafei Zhang
DOI: https://doi.org/10.1109/INEC.2008.4585648
2008-01-01
Abstract:The CNTs (carbon nanotubes)/Cu composite thin films were fabricated by a method combined electrophoresis and electroplating techniques. Uniform composite films with CNTs content from 0 to 32.68% were prepared. Relationship between sample resistivity and CNTs content is also studied. It shows that the resistivity of composite film is even lower than that of copper. Special mechanisms of copper grain growth and the time of electroplating were Investigated with different CNTs content.
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