Epitaxial BaTiO3 Thin Films on Different Substrates for Optical Waveguide Applications

Siegert M.,Lisoni Judit G.,Lei C. H.,Eckau A.,Zander W.,Jia C. L.,Schubert J.,Buchal Ch.
DOI: https://doi.org/10.1557/proc-597-145
1999-01-01
Abstract:In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO3 thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl2O4(100), SrTiO3(100) and MgO buffered A12O3(11̄02) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO3 films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.
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