A miniature system for particulate matter (PM) measurement

jianwen sun,zewen liu,kun yang,yanwu lu
DOI: https://doi.org/10.1109/ICSENS.2015.7370246
2015-01-01
Abstract:A new miniature particulate matter (PM) sensing system was designed and fabricated. The system contains three parts: one virtual impactor for separating the particle size, a micro-heater for depositing the selected particles using thermophoretic precipitation and an interdigital capacitor (IDC) for measuring particles mass concentration. The virtual impactor was designed to concentrate particle with diameter less than 2.5μm and fabricated by using 8 layers dry film photoresist technology to reach the thickness of 400μm. The micro-heater creates a temperature gradient across in the channel above the interdigital capacitor. The experimental result shows the thermophoretic deposition enhance the sampler efficiency of 84% compared to natural deposition. The mass-loading on the interdigital capacitor causes a change in its capacitance and impedance using black carbon as the particle sample. At the sweeping frequency of 4MHz, the sensitivity of capacitance and impedance are about -56.8pF/μg and 3.68Ohm/μg.
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