Fecosin Film with Ordered Feco Nanoparticles Embedded in A Si-Rich Matrix

Yan Liu,C. Y. Tan,Z. W. Liu,C. K. Ong
DOI: https://doi.org/10.1063/1.2714280
IF: 4
2007-01-01
Applied Physics Letters
Abstract:FeCoSiN film consisting of ordered arrays of FeCo nanoparticles embedded in a Si-rich matrix was fabricated on silicon substrate by reactive rf magnetron sputtering. These nanoparticles have a face-centered cubic structure and a mean diameter of ∼7nm. The FeCoSiN film has a very high resistivity of up to 1000μΩcm due to the breakup of the metal continuum into isolated metal nanoparticles. The static and dynamic magnetic properties of the film were also investigated. A saturation magnetization of 1.0T, coercivity of less than 5Oe in both easy and hard axes, and anisotropy field of 27Oe were obtained. The microwave permeability measurement showed a permeability of around 400 at low frequency and a ferromagnetic resonance frequency of about 1.1GHz.
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