Magnetic Properties of [fecosin/sinx](18) Multilayer Thin Films for Applications in Ghz Range

X. L. Liu,L. S. Wang,Q. Luo,Q. S. Xie,Q. F. Zhang,X. Liu,F. M. Bai,D. L. Peng
DOI: https://doi.org/10.1016/j.jallcom.2016.03.308
IF: 6.2
2016-01-01
Journal of Alloys and Compounds
Abstract:[FeCoSiN/SiNx](18) multilayer thin films with different SiNx layer thickness (t) ranging from 0.75 to 4 nm were fabricated by reactive magnetron co -sputtering without applying an external induced magnetic field. The grain size, morphology, electrical properties, and static and dynamic magnetic properties of [FeCoSiN/SiNx](18) multilayer thin films were investigated systematically. The results indicated that SiNx layer thickness had a profound impact on the physical properties of the multilayer thin films. The in plane uniaxial magnetic anisotropy field (from 114 +/- 21 to 163 +/- 14 Oe), ferromagnetic resonance frequency (from 4.09 to 4.64 GHz) and resistivity (from 188 to 333 mu Omega cm) could be tailored effectively by adjusting the SiNx layer thickness from 0.75 to 4 nm. Moreover, when the SiNx layer thickness reached 2 nm, the continuous growth of FeCoSiN polycrystalline layers was to be interrupted completely and it would result in a minimum grain size of 4.9 +/- 0.7 nm. The root mean square roughness of multilayer thin films also acquired a minimum value of 0.8 nm and the corresponding easy axis coercivity achieved a minimum value of 2.8 +/- 0.1 Oe. (C) 2016 Elsevier B.V. All rights reserved.
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