Band Alignment Between Ta2o5 And Metals For Resistive Random Access Memory Electrodes Engineering

vyq zhuo,yuhong jiang,m h li,e k chua,zhiyong zhang,j s pan,rongcai zhao,l p shi,t c chong,james p robertson
DOI: https://doi.org/10.1063/1.4792274
IF: 4
2013-01-01
Applied Physics Letters
Abstract:Band alignment of resistive random access memory (RRAM) switching material Ta2O5 and different metal electrode materials was examined using high-resolution X-ray photoelectron spectroscopy. Schottky and hole barrier heights at the interface between electrode and Ta2O5 were obtained, where the electrodes consist of materials with low to high work function Phi(m,vac) from 4.06 to 5.93 eV). Effective metal work functions were extracted to study the Fermi level pinning effect and to discuss the dominant conduction mechanism. An accurate band alignment between electrodes and Ta2O5 is obtained and can be used for RRAM electrode engineering and conduction mechanism study. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4792274]
What problem does this paper attempt to address?