Abstract:The advent of wearable sensing platforms capable of continuously monitoring physiological parameters indicative of health status have resulted in a paradigm shift for clinical medicine. The accessibility and adaptability of such portable, unobtrusive devices enables proactive, personalized care based on real-time physiological insights. While wearable sensing platforms exhibit powerful capabilities for continuously monitoring physiological parameters, device fabrication often requires specialized facilities and technical expertise, restricting deployment opportunities and innovation potential. The recent emergence of rapid prototyping approaches to sensor fabrication, such as laser-induced graphene (LIG), provides a pathway for circumventing these barriers through low-cost, scalable fabrication. However, inherent limitations in laser processing restrict the spatial resolution of LIG-based flexible electronic devices to the minimum laser spot size. For a CO2 laser-a commonly reported laser for device production-this corresponds to a feature size of ∼120 μm. Here, we demonstrate a facile, low-cost stencil-masking technique to reduce the minimum resolvable feature size of a LIG-based device from 120 ± 20 μm to 45 ± 3 μm when fabricated by CO2 laser. Characterization of device performance reveals this stencil-masked LIG (s-LIG) method yields a concomitant improvement in electrical properties, which we hypothesize is the result of changes in macrostructure of the patterned LIG. We showcase the performance of this fabrication method via production of common sensors including temperature and multi-electrode electrochemical sensors. We fabricate fine-line microarray electrodes not typically achievable via native CO2 laser processing, demonstrating the potential of the expanded design capabilities. Comparing microarray sensors made with and without the stencil to traditional macro LIG electrodes reveals the s-LIG sensors have significantly reduced capacitance for similar electroactive surface areas. Beyond improving sensor performance, the increased resolution enabled by this metal stencil technique expands capabilities for scalable fabrication of high-performance wearable sensors in low-resource settings without reliance on traditional fabrication pathways.

Low-Cost Shrink Lithography With Sub-22nm Resolution

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Self-Collapse Lithography

High Resolution Direct Writing Liquid Metal Patterns for Printed Stretchable Electronics

Photolithography Using Lateral Surface of Nanofibers

High-Resolution Rapid Prototyping of Liquid Metal Electronics by Direct Writing on Highly Prestretched Substrates

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Imprint Lithography with 25-Nanometer Resolution

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Hybrid nanoimprint-soft lithography with sub-15 nm resolution.

Pick and place process for uniform shrinking of 3D printed micro- and nano-architected materials

Nanoimprint lithography technology

Single digit nanofabrication by step-and-repeat nanoimprint lithography

Hard-Tip, Soft-Spring Lithography

Characterization of Shrink Film Properties for Rapid Microfluidics Lab-on-Chip Fabrication

Hyper-lithography

A hybrid mask–mould lithography scheme and its application in nanoscale organic thin film transistors

Beyond Conventional Patterns: New Electrochemical Lithography with High Precision for Patterned Film Materials and Wearable Sensors.

Fabrication of high-resolution, flexible, laser-induced graphene sensors via stencil masking

A New Strategy of Lithography Based on Phase Separation of Polymer Blends