Photoconductivity and Highly Selective Ultraviolet Sensing Features of Amorphous Silicon Carbon Nitride Thin Films

CW Chen,CC Huang,YY Lin,WF Su,LC Chen,KH Chen
DOI: https://doi.org/10.1063/1.2178406
IF: 4
2006-01-01
Applied Physics Letters
Abstract:Photoconductivity of amorphous silicon carbon nitride (a-SiCN) as a function of incident photon energies has been studied. A metal-semiconductor-metal photodetector device based on the a-SiCN thin film demonstrates excellent selective ultraviolet sensing features. A large photo-to-dark current ratio about 5000 and a relative quantum efficiency about ∼105 under illumination of the 250nm light source and a bias voltage of 5V were observed. A model based on the heterogeneous structure in the a-SiCN thin film which consists of π−π* bands and σ−σ* bands was introduced to account for the observed photoconductive transport properties.
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