Abstract:Since the discovery of monolayer graphene, the novel physical properties of two-dimensional (2D) materials, particularly those with fewer layers that often exhibit unique properties different from bulk materials, have received significant attention. Therefore, accurately determining the layer number or obtaining the microscopic surface morphology is crucial in the laboratory fabrication and during device manufacturing. However, traditional detection methods have numerous drawbacks. There is an urgent need for a convenient, accurate, and non-destructive scientific method to characterize the layer number and surface microstructure of 2D materials. By combining the experimental setup of laser scanning photocurrent spectroscopy, we develop a polarization-modulated scanning optical microscope based on the principle of reflectance difference spectroscopy. By monitoring the reflectivity of the samples, we can observe changes in the reflection signal strength of MoS 2 with different layer numbers. The intensity of the reflectance differential spectral signal reflects changes in the layer count within the sample. We can characterize the changes in the number of layers of 2D materials in a non-contact manner by using polarization-modulated scanning optical microscopy. Through the study of the reflectance differential spectra of two typical 2D layered materials, MoS 2 and ReSe 2 , we find that our polarization-modulated scanning optical microscope system is also more sensitive to the characteristics of the stacking anisotropy of the 2D materials than the conventional reflection microscope. This indicates that our research contributes to a better understanding of the layer number characteristics and anisotropic properties of layered 2D materials. Furthermore, our research also provides a non-contact optical method to characterize the number of layers and optical anisotropy of two-dimensional layered material.

Accurate Layers Determination of Graphene on Transparent Substrate Based on Polarization-Sensitive Absorption Effect

Polarization modulation scanning optical microscopy method

Optical Transmittance of Multilayer Graphene

Layer Number Determination and Thickness-dependent Properties of Graphene Grown on SiC

Thickness Estimation of Epitaxial Graphene on SiC using Attenuation of Substrate Raman Intensity

Rapid Identification of the Layer Number of Large-Area Graphene on Copper

Graphene to graphene, and substrate to substrate: how to reliably differentiate supported graphene from polycrystalline substrates using SEM?

Layer-number Determination of Two-Dimensional Materials by Optical Characterization

Versatile Optical Determination of Two-Dimensional Atomic Crystal Layers

Total Color Difference for Rapid and Accurate Identification of Graphene

Transferring and Identification of Single- and Few-Layer Graphene on Arbitrary Substrates

Rapid determination of the thickness of graphene using the ratio of color difference

A New Method for Measuring Multilayer Thickness Using a Chromatic Confocal Sensor

Thickness identification of two-dimensional materials by optical imaging.

Determining layer number of micro-mechanical exfoliated and CVD grown ultrathin graphenes by the methods of Raman intensity ratio

Nondestructive Andin Situdetermination of Graphene Layers Using Optical Fiber Fabry–Perot Interference

Chemical vapor deposition growth of few-layer graphene for transparent conductive films

Determination of the Number of Graphene Layers: Discrete Distribution of the Secondary Electron Intensity Derived from Individual Graphene Layers

A Facile Method for Precise Layer Number Identification of Two-Dimensional Materials Through Optical Images

Centimeter-scale high-resolution metrology of entire CVD-grown graphene sheets.

Rapid and reliable thickness identification of two-dimensional nanosheets using optical microscopy.