INFLUENCE OF DEPOSITION TEMPERATURE ON OPTICAL AND LASER-INDUCED DAMAGE PROPERTIES OF LaTiO3 FILMS

Junhong Su,Junqi Xu,Chen Yang,Yaojin Cheng

DOI: https://doi.org/10.1142/s0218625x15500705

2015-01-01

Surface Review and Letters

Abstract:LaTiO 3 films were prepared at room temperature, 60, 140 and 220°C using a thermal vapor deposition technique with an electronic beam gun to investigate the relationship between deposition temperatures and the optical properties of the samples. In the ellipsometric analysis, the corresponding refractive indexes were 1.8993, 1.9123, 1.9197 and 1.9283 at a wavelength of 1064 nm. At the same time, extremely low absorption characteristics of all the samples presented in the visible and IR regions. With the same high-energy testing laser of 200 mJ (about 40 J/cm2) at a wavelength of 1064 nm and a pulse width of 10 ns, the laser-induced damage threshold (LIDT) of the LaTiO 3 samples prepared at different temperatures were 15.5, 16.7, 18.5 and 18.2 J/cm2, respectively. This shows that a higher LIDT may be obtained at higher deposition temperatures.