Processing and Characterization of TiO2film Prepared on Glass Via Pulsed Laser Deposition

XS Zhou,YH Lin,B Li,LJ Li,JP Zhou,CW Nan
DOI: https://doi.org/10.1088/0022-3727/39/3/021
2006-01-01
Journal of Physics D Applied Physics
Abstract:Nanocrystalline titanium dioxide films with anatase structures were prepared on glass by pulsed laser deposition. Our results demonstrated that deposition temperature and oxygen pressure were important parameters in optimization of the microstructure and conductivity of TiO2 anatase film. The conductivity of the TiO2 film increased as the substrate temperature increased. It did not, however, increase further even though the depositions were performed above 600 degrees C. It was also confirmed that the conductivity showed a unique dependence on ambient oxygen pressure, which demonstrated the significant influence of oxygen pressure on the carrier concentration in thin oxide films.
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