Optimization of Waveguide Structures for Beam Splitters Fabricated in Fused Silica by Direct Femtosecond-Laser Inscription

Wei-Hao Yuan,Jin-Man Lv,Xiao-Tao Hao,Feng Chen
DOI: https://doi.org/10.1016/j.optlastec.2015.05.016
2015-01-01
Abstract:The Type-I waveguides fabricated by femtosecond laser inscription were reported in fused silica. Optimization of waveguide structures was conducted for fabricating 1×2 and 1×4 beam splitters. The change of the refractive index between femtosecond laser modified area and unmodified area was estimated to be 9×10−4. The minimum loss of the waveguides measured with the He–Ne laser at the wavelength of 632.8nm was determined to be as low as 1.34dB.
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