Burrowing Of Pt Nanoparticles Into Sio2 During Ion-Beam Irradiation

xiaoyuan hu,david g cahill,r s averback
DOI: https://doi.org/10.1063/1.1503387
IF: 2.877
2002-01-01
Journal of Applied Physics
Abstract:Atomic force microscopy and cross-sectional transmission electron microscopy are used to characterize the evolution of nanoparticle/substrate interfaces during heavy-ion bombardment. Pt nanoparticles, prepared by annealing 3 Angstrom Pt films on SiO2, embed into the substrates following 800 keV Kr+ irradiation. For Pt particles with diameters 5-20 nm, the depth of the embedding increases with an ion dose until the particles are fully submerged at a dose of similar to10(16) cm(-2). The results are explained by capillary driving forces and an ion-induced viscous flow of amorphous SiO2. The irradiation-induced viscosity of SiO2 needed to explain our results is similar to0.9x10(23) Pa ion cm(-2), consistent with previous measurements using stress relaxation. Similar results are obtained for 10 keV He+ irradiation, suggesting that ion-induced viscosity arises from localized defects rather than from the creation of large melt zones. The embedding of Pt particles is inhibited, however, for energetically unfavorable substrates such as alumina. (C) 2002 American Institute of Physics.
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