Prototype of Atomic Force Microscope with High Resolution Optical Microscope for Observing Magnetic Nanodot Arrays

Tao Jin,Ryosuke Takahashi,Hui Zhang,You Yin,Sumio Hosaka
DOI: https://doi.org/10.4028/www.scientific.net/kem.643.185
2015-01-01
Key Engineering Materials
Abstract:This paper is dedicated to develop an atomic force microscope (AFM) system cou-pled with a high resolution optical microscope (OM), which serves to observe AFM image from a desired micro-area. The system employs through-the-lens optical path for detecting atomic force based on optical lever. By switching the objective lenses from low to high magni cation, a micro-area for obtaining AFM image can be easily found. AFM images of magnetic nanodotarrays with 300 nm and 150 nm pitches are obtained from two local micro-areas using the system. The results demonstrate the proposed prototype has the su cient function to nd out a micro-area for obtaining AFM image.
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