Abstract:The micro-actuator is a key element of the MEMS-based initiator. In order to ensure safety and achieve the function of detonation energy isolation and transmission of the micro-pyrotechnic sequence, it is necessary to set up a safety and arming device between the micro-heater and energetic materials on the next level in the initiator. In this paper, the MEMS safety and arming device was simulated and analyzed, and the actuator chip was made based on MEMS technology and then tested. The results showed that the maximum temperature and displacement generated by the silicon-based micro-actuator increased with increasing actuation voltage. When the actuation voltage was larger than 16 V, the device could not work normally because the maximum temperature of the device was higher than the melting point of silicon. Furthermore, the influence factors on the state-recoverable property of the device were studied by changing the actuation voltage, length, width, and thickness of the V-shaped beam in a single way. The results showed that when the actuation voltage remained unchanged and the other factors were changed in a single way, the smaller structural parameters resulted in the shorter response time and recovery time, while the displacement generated was smaller. Meanwhile, the larger structural parameters resulted in larger displacements, while the response time and recovery time were larger. In addition, the state-recoverable characteristics of the device were affected by the working environmental temperature. It is of great significance to the design of the MEMS-based initiator.

Design of a Large Displacement Thermal Actuator with a Cascaded V-beam Amplification for MEMS Safety-and-arming Devices

Design of a Novel Electrothermal Actuator for Integrated MEMS Safety-and-arming Devices.

Design and Characterization of a Large Displacement Electro-thermal Actuator for a New Kind of Safety-and-Arming Device

The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism.

Integration Design of MEMS Electro-Thermal Safety-and-arming Devices

Designing Micro-displacement Amplifier for Giant Magnetostrictive Actuator

Design and Research on Large Displacement Bidirectional MEMS Stage with Interlock Mechanism

Large Displacement Spring-Like Electro-Mechanical Thermal Actuators with Insulator Constraint Beams

Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments

The Effect of Infrared Laser-Induced Micro/Nano Photothermal Expansion and the Novel Method of Photothermal Actuation

Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Design of Silicon-Based Micro-Actuator with Two State-Recoverable Semicircle Slides for Switching On/off Detonation Energy

Design of a High-Speed Electrothermal Linear Micromotor for Microelectromechanical Systems Safety-and-arming Devices

Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement

A thermal actuator design for a safe and arming mems interrupter

Research on Multiphysics-Driven MEMS Safety and Arming Devices

Thermal Actuator of Safety and Arming Device Based on MEMS Fuze

A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

Design of a Double-Layer Electrothermal MEMS Safety and Arming Device with a Bistable Mechanism

A large vertical displacement electrothermal bimorph microactuator with very small lateral shift

Design of MEMS-based Compliant Micro-transmissions