The Role of Energetic Plasma in Pulsed Laser Deposition of Epitaxial Manganite Films

WB Wu,KH Wong,CL Choy
DOI: https://doi.org/10.1088/0022-3727/32/15/102
1999-01-01
Abstract:Epitaxial La0.7Sr0.3MnO3 thin films have been grown on LaAlO3(001) substrates by pulsed laser deposition under different target-plume-substrate configurations. Outgrowths of various shape and size from some of the manganite films are observed. When the substrate is placed within the visible laser-produced energetic plasma plume, the deposited films are outgrowth-free and exhibit good crystallinity and high electrical conductivity. The formation mechanisms and control measures of the outgrowths in pulsed laser deposited manganite films are discussed.
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