Preparation Optimization of ATO Particles by Robust Parameter Design

Qi An,Genghua Bai,Yang,Cui Wang,Quehong Huang,Chao Liu,Shujun Chen,Jun Cao,Sisi Zheng,Zhengui Gu,Bin Xiang
DOI: https://doi.org/10.1016/j.mssp.2015.10.023
IF: 4.1
2015-01-01
Materials Science in Semiconductor Processing
Abstract:3-level-3-factor robust parameter design and variance analysis were employed to optimize the formulatimemon process of antimony doped tin oxide (ATO) particles with high conductivity. Results indicated that optimized formulation parameters were as follow: Sb doped content of 11mol%, calcination temperature of 800°C and calcination time of 0.75h. For the ATO powder prepared under the above optimal condition, the conductivity of ATO in the validation experiment was 7.6511Scm−1, which was almost close to the predicted value, and the ATO powder had smaller diameter, higher transmittance in visible region as well as better thermal insulating properties than its counterparts.
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