Femtosecond Laser-Induced Forward Transfer for Multilayer Plasmonic Metamaterials

Pin Chieh Wu,Ming Lun Tseng,Wei Ting Chen,Chun Yen Liao,Cheng Hung Chu,Shulin Sun,Chia Min Chang,Ding-Wei Huang,Po-Li Chen,Lei Zhou,Ta-Jen Yen,Din Ping Tsai
DOI: https://doi.org/10.1117/2.1201210.004491
2012-01-01
SPIE Newsroom
Abstract:Metamaterials are artificially engineered composites that exhibit extraordinary optical properties not found in nature, such as negative refraction. These materials have potential application in ultra-high-resolution imaging devices and nanolasers based on plasmonics. So-called plasmonic metamaterials exploit surface plasmons, a form of surface electromagnetic radiation triggered by light. The split-ring resonator (SRR) is one of the most commonly used building blocks for constructing plasmonic metamaterials.1–3 These U-shaped structures are individually designed to produce a particular magnetic response— known as plasmonic resonance—to the electromagnetic field. When incident light hits the plasmonic resonance of SRR-based metamaterials, the behavior of the composite changes, depending on the nature of the resonance. In addition, a near-field coupling effect between different plasmonic metamaterials gives rise to unusual physical phenomena, such as Fano resonance and a toroidal dipolar response. These effects are particularly interesting for the development of sensors and slow-light devices, to give just two examples.4–6 Ideas and strategies for practical application abound in the field of plasmonic metamaterials. However, several problems must first be overcome. One challenge is that to qualify as a real material, metamaterials must comprise truly 3D multilayer unit cells. Technologies used to date to fabricate multilayer and 3D plasmonic structures include electron beam lithography, in which alignment errors caused by the multiexposure process make fine control very difficult.7–10 Figure 1. (a) Schematic showing fabrication of multilayer plasmonic structures by contact-mode femtosecond laser-induced forwardtransfer (fs-LIFT). (b) Separating the laser-processed donor-receiver pair yields multilayer plasmonic structures. (c) Feature dimensions of the multilayer metamaterial. BK-7: Glass. as-Ge2Sb2Te5: As-deposited germanium antimony tellurium. Au: Gold. ZnS-SiO2: Zinc sulfidesilicon dioxide.
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