Abstract:Nanophotonics is an emerging research field that deals with interaction between light and matter in a sub-micron length scale. Nanophotonic devices have found an increasing number of applications in many areas including optical communication, microscopy, sensing, and solar energy harvesting especially during the past two decades. Among all nanophotonic devices, three main areas, namely photonic crystals, optical metamaterials and plasmonic devices, gain dominant interest in the photonic society owning to their potential impacts. This thesis studies the fabrication and characterization of three types of novel devices within the above-mentioned areas. They are respectively photonic-crystal (PhC) surface-mode microcavities, optical metamaterial absorbers, and plasmonic couplers. The devices are fabricated with modern lithography-based techniques in a clean room environment. This thesis particularly describes the critical electron-beam lithography step in detail; the relevant obstacles and corresponding solutions are addressed. Device characterizations mainly rely on two techniques: a vertical fiber coupling system and a home-made optical transmissivity/reflectivity setup. The vertical fiber coupling system is used for characterizing on-chip devices intended for photonic integrations, such as PhC surface-mode cavities and plasmonic couplers. The transmissivity/reflectivity setup is used for measuring the absorbance of metamaterial absorbers. This thesis presents mainly three nanophotonic devices, from fabrication to characterization. First, a PhC surface-mode cavity on a SOI structure is demonstrated. Through a side-coupling scheme, a system quality-factor of 6200 and an intrinsic quality-factor of 13400 are achieved. Such a cavity can be used as ultra-compact optical filter, bio-sensor and etc. Second, an ultra-thin, wide-angle metamaterial absorber at optical frequencies is realized. Experimental results show a maximum absorption peak of 88% at the wavelength of ~1.58μm. The ultra-fast photothermal effect possessed by such noble-metal-based nanostructure can potentially be exploited for making better solar cells. Finally, we fabricated an efficient coupler that channels light from a conventional dielectric waveguide to a subwavelength plasmonic waveguides and vice versa. Such couplers can combine low-loss dielectric waveguides and lossy plasmonic components onto one single chip, making best use of the two.

Fabrication of three-dimensional plasmonic cavity by femtosecond laser-induced forward transfer.

Fabrication of Plasmonic Cavity and Indefinite Metamaterial by Laser-Induced Forward Transfer

Fabrication of Optical Cavities with Femtosecond Laser Pulses

High-Q, Low-Mode-volume Microsphere-Integrated Fabry–Perot Cavity for Optofluidic Lasing Applications

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Multilayer Metamaterials by Femtosecond Laser‐induced Forward‐transfer Technique

Femtosecond Laser-Induced Forward Transfer for Multilayer Plasmonic Metamaterials

Single-Nanorod Plasmon Nanolaser: A Route Toward A Three-Dimensional Ultraconfined Lasing Mode

Multimode vibrational strong coupling in Direct Laser written Mid-IR plasmonic MIM nano-patch antennas

Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process

Surface-Plasmon-Polariton Laser Based on an Open-Cavity Fabry-Perot Resonator

Plasmonic triple compound cavity random lasing: fabrication and characterization

Photothermal Fusion of Gold Nanoparticles in a Plasmonic Metamaterial

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Deep subwavelength confinement and giant enhancement of light field by a plasmonic lens integrated with a metal-insulator-metal vertical nanocavity.

Low-Threshold Multiwavelength Plasmonic Nanolasing in an "H"-Shape Cavity

Inlayed “Atom-Like Three-Dimensional Photonic Crystal Structures Created with Femtosecond Laser Microfabrication

Surface Plasmon Polariton Laser Based on a Metallic Trench Fabry-Perot Resonator

An Efficient Non-Invasive Method to Fabricate In-Fiber Microcavities Using a Continuous-Wave Laser

High-fidelity fabrication of plasmonic nanoholes array via ion-beam planarization for extraordinary transmission applications

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.