Abstract:Metamaterials are artificially engineered composites that exhibit extraordinary optical properties not found in nature, such as negative refraction. These materials have potential application in ultra-high-resolution imaging devices and nanolasers based on plasmonics. So-called plasmonic metamaterials exploit surface plasmons, a form of surface electromagnetic radiation triggered by light. The split-ring resonator (SRR) is one of the most commonly used building blocks for constructing plasmonic metamaterials.1–3 These U-shaped structures are individually designed to produce a particular magnetic response— known as plasmonic resonance—to the electromagnetic field. When incident light hits the plasmonic resonance of SRR-based metamaterials, the behavior of the composite changes, depending on the nature of the resonance. In addition, a near-field coupling effect between different plasmonic metamaterials gives rise to unusual physical phenomena, such as Fano resonance and a toroidal dipolar response. These effects are particularly interesting for the development of sensors and slow-light devices, to give just two examples.4–6 Ideas and strategies for practical application abound in the field of plasmonic metamaterials. However, several problems must first be overcome. One challenge is that to qualify as a real material, metamaterials must comprise truly 3D multilayer unit cells. Technologies used to date to fabricate multilayer and 3D plasmonic structures include electron beam lithography, in which alignment errors caused by the multiexposure process make fine control very difficult.7–10 Figure 1. (a) Schematic showing fabrication of multilayer plasmonic structures by contact-mode femtosecond laser-induced forwardtransfer (fs-LIFT). (b) Separating the laser-processed donor-receiver pair yields multilayer plasmonic structures. (c) Feature dimensions of the multilayer metamaterial. BK-7: Glass. as-Ge2Sb2Te5: As-deposited germanium antimony tellurium. Au: Gold. ZnS-SiO2: Zinc sulfidesilicon dioxide.

Fabrication of Multilayer Metamaterials by Femtosecond Laser‐induced Forward‐transfer Technique

Femtosecond Laser-Induced Forward Transfer for Multilayer Plasmonic Metamaterials

Hybrid Bilayer Plasmonic Metasurface Efficiently Manipulates Visible Light

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Plasmonic Cavity and Indefinite Metamaterial by Laser-Induced Forward Transfer

Fabrication of three-dimensional plasmonic cavity by femtosecond laser-induced forward transfer.

Single-step fabrication of high performance extraordinary transmission plasmonic metasurfaces employing ultrafast lasers

Fractal Plasmonic Metamaterials for Subwavelength Imaging.

Optical Metamaterials at Near and Mid-Ir Range Fabricated by Nanoimprint Lithography

Parallel laser microfabrication of terahertz metamaterials and its polarization-dependent transmission property

Ultrafast Laser‐Induced Plasmonic Modulation of Optical Properties of Dielectrics at High Resolution

Fast Fabrication of Silver Helical Metamaterial with Single-Exposure Femtosecond Laser Photoreduction

Metamaterials: from 3D Plasmonic Nanostructure to Reflective Metasurface

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Large-Area Plasmonic Structures Fabricated by Laser Nanopatterning and Their Applications

Broadband and Multiband Terahertz Metamaterials Based on 3-D-Printed Liquid Metal-Filled Microchannel

Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

Fast Fabrication of Fishnet Optical Metamaterial Based on Femtosecond Laser Induced Stress Break Technique

High-fidelity fabrication of plasmonic nanoholes array via ion-beam planarization for extraordinary transmission applications

Formation of Highly Tunable Periodic Plasmonic Structures on Gold Films Using Direct Laser Writing

High‐Efficiency and Low‐Intensity Threshold Femtosecond Laser Direct Writing of Precise Metallic Micropatterns on Transparent Substrate