A Sub-10nm U-Shape Finfet Design with Suppressed Leakage Current and Dibl Effect

Wei-Chao Zhou,Peng-Fei Wang,David Wei Zhang
DOI: https://doi.org/10.1109/cstic.2015.7153322
2015-01-01
Abstract:In this paper, a U-shape fin field-effect transistor (U-FinFET) is proposed for sub-10nm technology and low power applications. Compared with the conventional tri-gate fin field-effect transistor (FinFET), this structure has the advantages of relatively low off-state channel leakage current (Ioff) and sub-threshold swing (SS). By using Sentaurus TCAD simulations, it is found that the U-shape channel can also suppress the drain induced barrier lowering (DIBL) effect.
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