Abstract:Recently, considerable attention has been drawn to the field of micro/nanofluidic channels. However, current methods for fabricating micro/nanochannels are complex, costly, and time-intensive. In the present work, we successfully fabricated transparent submicron-channels on fused silica substrates (SiO2) using a straightforward laser process. To achieve this, a single-pulse excimer laser irradiation in a rear side configuration was employed to treat a thin film of UV-absorbing silicon suboxide (SiOx) through the transparent SiO2 substrate. A polydimethylsiloxane (PDMS) superstrate (coating layer) was applied over the SiOx film before laser exposure, serving as a confinement for controlled structure formation induced by the laser. Under optimal laser fluence, the thin SiOx film buckled, leading to the formation of channels with a width ranging from 10 to 20 µm and a height of 800 to 1200 nm, exhibiting a bell-like cross-sections following the so-called Euler buckling mode. Wider channels displayed morphologies resembling varicose or telephone cord modes. Subsequent high-temperature annealing led to the oxidation of SiOx, resulting transparent SiO2 channels on the fused silica substrate. The manufactured nanochannels exhibited promising potential for effectively transporting fluids of diverse viscosities. Various fluids were conveyed through these nanochannels via capillary action and in accordance with the Lucas-Washburn equation.

Buried centimeter-long micro- and nanochannel arrays in porous silicon and glass.

Laser Lithography of Monolithically‐Integrated Multi‐Level Microchannels in Silicon

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration.

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Fabrication of Silicon Nanopore Arrays Using A Combination of Dry and Wet Etching

Glass etching to bridge micro- and nanofluidics.

Three-dimensional Microfluidic Channel with Arbitrary Length and Configuration Fabricated Inside Glass by Femtosecond Laser Direct Writing.

A novel method to fabricate silicon nanopore arrays

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Horizontal Buried Channels in Monocrystalline Silicon

Hybrid Laser Microfabrication of Three-Dimensional Large-Scale Fused Silica Microfluidic Chips

Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Colloidal Lithography-Based Fabrication of Highly-Ordered Nanofluidic Channels with an Ultra-High Surface-to-volume Ratio

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

A New Silicon Mold Process for Polydimethylsiloxane Microchannels

Fabricating Nanofluidic Channels and Applying It for Single Bio-Molecule Study.

Fabrication of Three-Dimensional Microchannels Inside Silicon Using A Femtosecond Laser

Massive Fabrication of Silicon Nanopore Arrays with Tunable Shapes