Abstract:We demonstrate a simple, controllable, and stable method for fabricating high fill factor cylindrical microlens array with a novel isolated thermal reflow process. In this method, microstripes with a very small gap were obtained via digital micromirror device-based lithography, then covered with polydimethylsiloxane (PDMS) solution. The prepared microstripes were isolated and were heated and reflowed to a cylindrical microlens array. During the reflow process, the semicross-linked PDMS can serve as a barrier to prevent the diameter change and the bonding of adjacent microlenses. By this special treatment, the fill factor of the cylindrical microlens array can be significantly improved. Moreover, the reflow time and temperature have very little effect on the microlens shape due to the surrounded semicross-linked PDMS. This will make our process stabler than traditional methods. The measured 3D profile is good and satisfactory, and excellent optical performance is demonstrated with the fabricated cylindrical microlens arrays. The proposed method may offer a viable route for fabrication of high fill factor microlens arrays in a very simple and stable way.

Fabrication of Large Curvature Microlens Array Using Confined Laser Swelling Method.

Microlens Arrays: Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes (adv. Mater. 23/2012)

A Fast and Efficient Fabrication Method for Microlens Array by Using Picosecond Laser Induced Volume Swelling

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

A Facile Method to Fabricate Close-Packed Concave Microlens Array on Cylindrical Glass

Fabrication of Microlens Array with Well-Defined Shape by Spatially Constrained Thermal Reflow

Facile Fabrication of Flexible Concave Microlens Arrays with a Well-Controlled Curvature

Fabrication of High Fill-Factor Microlens Array Using Spatially Constrained Thermal Reflow

Lateral Flow Through A Parallel Gap Driven by Surface Hydrophilicity and Liquid Edge Pinning for Creating Microlens Array

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Large-area Microlens Arrays Fabricated on Flexible Polycarbonate Sheets Via Single-Step Laser Interference Ablation

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.

Fabrication of Polymer Microlens Array with Controllable Focal Length by Modifying Surface Wettability

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Fabrication of High Fill Factor Cylindrical Microlens Array with Isolated Thermal Reflow

Electrically Templated Dewetting of A Uv-Curable Prepolymer Film for the Fabrication of A Concave Microlens Array with Well-Defined Curvature