Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.

Xiangming Li,Yucheng Ding,Jinyou Shao,Hongmiao Tian,Hongzhong Liu
DOI: https://doi.org/10.1002/adma.201104625
IF: 29.4
2012-01-01
Advanced Materials
Abstract:The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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