The Fabrication of Vertically Aligned and Periodically Distributed Carbon Nanotube Bundles and Periodically Porous Carbon Nanotube Films Through a Combination of Laser Interference Ablation and Metal-Catalyzed Chemical Vapor Deposition.

Dajun Yuan,Wei Lin,Rui Guo,C. P. Wong,Suman Das
DOI: https://doi.org/10.1088/0957-4484/23/21/215303
IF: 3.5
2012-01-01
Nanotechnology
Abstract:Scalable fabrication of carbon nanotube (CNT) bundles is essential to future advances in several applications. Here, we report on the development of a simple, two-step method for fabricating vertically aligned and periodically distributed CNT bundles and periodically porous CNT films at the sub-micron scale. The method involves laser interference ablation (LIA) of an iron film followed by CNT growth via iron-catalyzed chemical vapor deposition. CNT bundles with square widths ranging from 0.5 to 1.5 µm in width, and 50-200 µm in length, are grown atop the patterned catalyst over areas spanning 8 cm(2). The CNT bundles exhibit a high degree of control over square width, orientation, uniformity, and periodicity. This simple scalable method of producing well-placed and oriented CNT bundles demonstrates a high application potential for wafer-scale integration of CNT structures into various device applications, including IC interconnects, field emitters, sensors, batteries, and optoelectronics, etc.
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