Abstract:The demand for microfluidic pressure sensors is ever-increasing in various industries due to their crucial role in controlling fluid pressure within microchannels. While syringe pump setups have been traditionally used to regulate fluid pressure in microfluidic devices, they often result in larger setups that increase the cost of the device. To address this challenge and miniaturize the syringe pump setup, the researcher introduced integrated T-microcantilever-based microfluidic devices. In these devices, microcantilevers are incorporated, and their deflections correlate with the microchannel's pressure. When the relative pressure of fluid (plasma) changes, the T-microcantilever deflects, and the extent of this deflection provides information on fluid pressure within the microchannel. In this work, finite element method (FEM) based simulation was carried out to investigate the role of material, and geometric parameters of the cantilever, and the fluid viscosity on the pressure sensing capability of the T-microcantilever integrated microfluidic channel. The T-microcantilever achieves a maximum deflection of 127μm at a 5000μm/s velocity for Young's modulus(E) of 360 kPa of PDMS by employing a hinged structure. On the other hand, a minimum deflection of 4.05 × 10-5μm was attained at 5000μm/s for Young's modulus of 1 TPa for silicon. The maximum deflected angle of the T-cantilever is 20.46° for a 360 kPa Young's modulus while the minimum deflection angle of the T-cantilever is measured at 13.77° for 900 KPa at a fluid velocity of 5000μm s-1. The T-cantilever functions as a built-in microchannel that gauges the fluid pressure within the microchannel. The peak pressure, set at 8.86 Pa on the surface of the cantilever leads to a maximum deflection of 0.096μm (approximately 1μm) in the T-cantilever at a 1:1 velocity ratio. An optimized microfluidic device embedded with microchannels can optimize fluid pressure in a microchannel support cell separation.

Transient Deflection Response in Microcantilever Array Integrated with Polydimethylsiloxane (PDMS) Microfluidics.

Demonstration of Microcantilever-Based Sensor Array with Integrated Microfluidics

Chemical Specificity in Nanomechanical Sensors

Detection of Ph Variation Using Modified Microcantilever Sensors

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Microcantilever (MCL) Biosensing

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Experimental and theoretical aspects of glucose measurement using a microcantilever modified by enzyme-containing polyacrylamide.

Microcantilever Biosensors Based on Conformational Change of Proteins.

Fabrication and characterization of SiO2 microcantilever for microsensor application

Microcantilever array sensors with integrated PDMS microfluidics

DEMONSTRATION OF MICROCANTILEVER BIOSENSOR ARRAY WITH IN-PLANE PHOTONIC TRANSDUCTION MECHANISM

A Monolithically Integrated Microcantilever Biosensor Based on Partially Depleted SOI CMOS Technology

Optimization of Newtonian fluid pressure in microcantilever integrated flexible microfluidic channel for healthcare application

Performance Analysis of Microcantilever Array Sensing

Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

A Microfluidic Sensor for Dynamic Surface Tension Measurement

Cantilever-based Transducer for Molecules Configuration Research

Demonstration of Microcantilever Array with Simultaneous Readout Using an In-Plane Photonic Transduction Method

A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics

A Silicon Resonant Micro-Cantilever Biosensor with Closed-Loop Self-Excitation System for Biomacromolecular Detection