Abstract:Flexible integrated circuits, working as the core unit of information processing, have been a subject of extensive research; they are essential to realize fully flexible electronic systems, which possess advantages over the current hybrid flexible systems (part or all based on rigid silicon chips) because of their extended application forms, better adaptability, and greater ability to operate at biotic/abiotic interfaces. To a great extent, the deliverable functionality of the ultimate integrated system is determined by the information handling capability of flexible integrated circuits, which is highly dependent on their performance and integration scale. Additionally, as the applications of flexible electronic systems become increasingly favorable in portable, wearable, or remote forms with a restrained power supply, the power dissipation of flexible integrated circuits becomes crucial, as they consume considerable energy in a system. Due to the restricted fabrication circumstances on flexible substrates with a low thermal budget and complex working environments (from the perspectives of both mechanical and electrical conditions), pursuing flexible integrated circuits with high performance, decent integration scale, and low power consumption is very challenging, but it is necessary for advanced, fully flexible systems. Other characteristics, such as biocompatibility, degradability, and configurability, would add value to flexible integrated circuits and introduce unconventional forms and new deliverables for flexible electronics. In this Account, we summarize our efforts toward developing carbon nanotube-based flexible integrated circuits over the past five years. As promising candidates for constructing next-generation chips, carbon nanotube-based integrated circuits have demonstrated their superiority in performance and power consumption, and we extend these advancements to a flexible form through material optimization, device design, processing technology development, etc. We start with a brief introduction to carbon nanotube properties to reveal their intrinsic advantages as channel materials for next-generation electronics. Next, we discuss the manufacturing methods we developed to construct integrated circuits on flexible substrates via a direct fabrication or transfer process to maintain these advantages and fit the circuits to different application circumstances. Then, demonstrations of carbon nanotube-based flexible integrated circuits with different forms and characteristics are presented, including (1) the implantation of complementary metal-oxide-semiconductor circuits on ultrathin substrates with high performance, (2) transferrable integrated circuits with a biointegration capability and low power consumption, (3) degradable integrated circuits manufactured at the wafer scale with a high yield and high uniformity, and (4) configurable integrated circuits with multiple functions. Integrated flexible sensor systems constructed with some of these circuits have also been introduced. Finally, we end the Account with an overview of the remaining challenges and new opportunities that have been opened up for carbon nanotubes in flexible integrated circuits and new forms of electronics.

Flexible high-performance carbon nanotube integrated circuits

Ultrathin High-Mobility SWCNT Transistors with Electrodes Printed by Nanoporous Stamp Flexography

Monolithic Three‐dimensional Integration of Aligned Carbon Nanotube Transistors for High‐performance Integrated Circuits

Flexible CMOS Integrated Circuits Based on Carbon Nanotubes with Sub-10 Ns Stage Delays

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

Carbon nanotube-based flexible high-speed circuits with sub-nanosecond stage delays

Flexible Integrated Circuits Based on Carbon Nanotubes

High-Performance Carbon Nanotube Thin-Film Transistor Technology

Fully transparent solution-processed carbon nanotube thin film transistors on a flexible substrate

(Invited) High-Performance Carbon Nanotube Based Flexible Electronics for Integrated Smart Sensor System

Low-voltage High-Performance Flexible Digital and Analog Circuits Based on Ultrahigh-Purity Semiconducting Carbon Nanotubes

A novel thin-film transistor using carbon nanotubes as both channel and electrodes

Fabrication of All‐Carbon Nanotube Electronic Devices on Flexible Substrates Through CVD and Transfer Methods

Nanotube and Nanowire Transistors

Encapsulate-and-peel: fabricating carbon nanotube CMOS integrated circuits in a flexible ultra-thin plastic film

Logic circuits composed of flexible carbon nanotube thin-film transistor and ultra-thin polymer gate dielectric

Inkjet-Printing-Based Density Profile Engineering of Single-Walled Carbon Nanotube Networks for Conformable High-On/Off-Performance Thin-Film Transistors

Transparent driving thin-film transistor circuits based on uniformly grown single-walled carbon nanotubes network

Low-power carbon nanotube-based integrated circuits that can be transferred to biological surfaces

Three-Dimensional Flexible Complementary Metal-Oxide-Semiconductor Logic Circuits Based on Two-Layer Stacks of Single-Walled Carbon Nanotube Networks.

Thin-Film Field-Effect Transistors Based on Composites of Semiconducting Polymer and Carbon Nanotubes