High-Frequency Bipolar-Transistor on Simox

U MAGNUSSON,H NORSTROM,W KAPLAN,S ZHANG,M JARGELIUS,D SIGURD
1993-01-01
Abstract:A high frequency, double polysilicon bipolar transistor technology on SIMOX is presented. The SOI substrate consists of a conventional SIMOX wafer upon which a twin epi-layer is grown. A high-frequency bipolar transistor technology is then transferred to this substrate. The initial experimental results are presented and show a high cut-off frequency of some 12.4 GHz. A comparison with identical devices fabricated on bulk substrates is also given and indicate that an increase of about 20% in fT can be expected.
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