Impact of Random Interface Traps and Random Dopants in High- /Metal Gate Junctionless FETs

Yijiao Wang,Peng Huang,Kangliang Wei,Lang Zeng
DOI: https://doi.org/10.1109/TNANO.2014.2312482
2014-01-01
IEEE Transactions on Nanotechnology
Abstract:In this paper, the fluctuation of random interface traps (RITs) and its interaction with random dopants of 22-nm junctionless FETs (JL-FET) with high-$k$/metal gate (HKMG) are investigated with 3-D statistical TCAD simulations. The impacts of RIT and random dopant fluctuation (RDF) on the performances of JL-FET are evaluated separately and together. The results show that acceptor-like interface traps mainly affect the drive current, while donor-like interface traps have a significant impact on the subthreshold region. RIT and RDF have different impacts on device performance. Although the influence of RDF is larger than RIT, the impact of RIT cannot be neglected due to their strong correlation. The variation induced by RIT and RDF should be taken into account simultaneously for HKMG JL-FETs.
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