Abstract:Aluminum-doped zinc oxide (AZO) is a popular, low-cost, nontoxic material that finds application as a transparent conducting electrode in photonic, sensing, and photovoltaic devices. We report the AZO thin films with a high figure of merit on large-area glass substrates by direct current magnetron sputtering without any intentional substrate heating. Furthermore, a simple thermal post-treatment to improve the transmittance of AZO thin film in the infrared region for its application in low-band-gap devices is presented. High optoelectronic properties are obtained by optimizing oxygen content during the sputtering process. The structural, morphological, optoelectrical, and photoluminescence characterization of cold sputtered AZO films is investigated for its latent applications. AZO thin films with an electrical sheet resistance of 8.8 Ω/□ and a visible light transmittance of 78.5% with thickness uniformity above 95% are achieved on 300 mm × 300 mm glass substrate. The AZO film with optimized process conditions is employed as a transparent electrode to fabricate a copper-indium-gallium-selenide-based thin film solar cell, demonstrating 11.8% power conversion efficiency. The AZO film with optimized sputter conditions was post-treated in ambient conditions with an Al blanket to suppress the resistivity by proper organization of the defects due to Al consumption and point defects, resulting in improved transparency (85%) in the infrared region with a sheet resistance of 40 Ω/□. This has great potential for developing scalable and low-cost AZO thin films for transparent electrodes in a wide range of the spectrum.

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Analysis of Optical and Morphological Properties of Aluminium Induced Texture Glass Superstrates

Deposition and Characterization of AZO Thin Films on Flexible Glass Substrates Using DC Magnetron Sputtering Technique

Light Scattering Enhancement by Double Scattering Technique for Multijunction Thin-Film Silicon Solar Cells

Light Scattering by Textured Al-Doped Zinc Oxide Film for Thin Film Silicon Solar Cells Coated on Glass Substrates

Method for Fabricating Textured High-Haze ZnO:Al Transparent Conduction Oxide Films on Chemically Etched Glass Substrates

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Textured Surface Aluminum-Doped Zinc Oxide Thin Films Prepared by Direct Current Magnetron Sputtering

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Surface texturing studies of bilayer transparent conductive oxide (TCO) structures as front electrode for thin-film silicon solar cells

TEXTURED TRANSPARENT CONDUCTIVE ZAO THIN FILMS DEPOSITED BY MAGNETRON SPUTTERING

Room Temperature Sputtered Aluminum-Doped ZnO Thin Film Transparent Electrode for Application in Solar Cells and for Low-Band-Gap Optoelectronic Devices

A study of superstrate amorphous silicon thin film solar cells and modules on flexible BZO glass

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Improving Performance of Bifacial‐Grid III–V Solar Cells Bonded on Glass by Selective Contact Annealing

Highly Surface-Textured ZnO:Al Films Fabricated by Controlling the Nucleation and Growth Separately for Solar Cell Applications

High Haze Ratio-Based ITO Films Prepared on Periodic Textured Glass Surfaces for Thin Film Solar Cells

Investigation of Texturization for Monocrystalline Silicon Solar Cells with Different Kinds of Alkaline

Sputtered AZO Thin Films for TCO and Back Reflector Applications in Improving the Efficiency of Thin Film a-Si:H Solar Cells

Amorphous silicon thin‐film solar cells deposited on flexible substrates using different zinc oxide layers