Excellent Resistive Switching Characteristics of Cu Doped ZrO2 and Its 64 Bit Cross-Point Integration

Ming Liu,Weihua Guan,Shibing Long,Qi Liu,Wei Wang
DOI: https://doi.org/10.1109/icsict.2008.4734692
2008-01-01
Abstract:Excellent nonpolar resistive switching behavior is reported in the Cu doped ZrO2 memory devices with the sandwiched structure of Cu/ZrO2:Cu/Pt. The ratio between the high and low resistance is in the order of 106. Set and Reset operation in voltage pulse mode can be as fast as 50 ns and 100 ns, respectively. Multilevel storage is considered feasible due to the dependence of ON-state resistance on Set compliance current. The switching mechanism is demonstrated to be related with the formation and rupture of Cu conductive bridge. Based on this working cell, 64 bit cross-point array is fabricated and tested.
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