Aberration corrected ultra-compact ultra-large angle curved grating multiplexer and demultiplexer on SOI platform

y huang,jianglin ma,seokho chang,qian zhao,s t ho
DOI: https://doi.org/10.1109/cleo.2008.4551908
2008-01-01
Abstract:We describe a novel aberration free etched diffraction grating on SOI platform for on chip wavelength multiplexing and demultiplexing. Initial fabrication with 1 micron slit gives 200 GHz channel pass band with < 0.2 mm2 chip size.
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