Metamorphic InP/InGaAs Double-Heterojunction Bipolar Transistor Structure Grown on GaAs by Solid Source Molecular Beam Epitaxy

HQ Zheng,K Radhakrishnan,H Wang,KH Yuan,SF Yoon,GI Ng
DOI: https://doi.org/10.1109/iciprm.2000.850225
2000-01-01
Abstract:We report, for the first time, metamorphic InP/InGaAs double-heterojunction bipolar transistor (DHBT) structures grown on GaAs substrates by solid source molecular beam epitaxy (SSMBE). A linearly graded InxGa1-xP(x:0.48 to 1) buffer layer was used to accommodate the strain relaxation. Mesa-type devices were fabricated and characterized. The devices show promising DC and RF performances, indicating the great potential for SSMBE growth of metamorphic InP/InGaAs HBT structures for high speed and high frequency applications
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