Single stress liner for both NMOS and PMOS current enhancement by a novel ultimate spacer process

y c liu,j w pan,t y chang,p w liu,b c lan,c h tung,c h tsai,t f chen,c j lee,w m wang,y a chen,h l shih,l y tung,l w cheng,t m shen,s c chiang,m f lu,w t chang,y h luo,d k nayak,daniel gitlin,h l meng
DOI: https://doi.org/10.1109/IEDM.2005.1609486
2005-01-01
Abstract:For the first time, 75% and 7% drive current improvement is simultaneously achieved in both N/PMOS by adopting ultimate spacer process (USP) with a single stress liner. High out-of-plane stress in the channel accounts for the simultaneously enhanced drive current in N/PMOS. A 15% speed enhancement without compromising yield and product qualification in field-programmable gate arrays (FPGA) confirms immediate manufacturing feasibility of USP. This process provides a unique approach to significantly enhance device performance for 65nm CMOS technology and beyond. Extreme current increase of 25% in NMOS and 35% in PMOS can be achieved by applying additional strain enhancement methods
What problem does this paper attempt to address?