Self-aligned TiSi/sub 2/si Hetero-Nanocrystal Nonvolatile Memory

Zhu, Yan,Zhao, Dengtao,Li, Ruigang,Jianlin Liu

DOI: https://doi.org/10.1109/drc.2005.1553075

2005-01-01

Abstract:After the proposal of nanocrystal floating gate memory by Tiwari, tremendous effort has been made to improve the device performance of a memory containing nanocrystal floating gate, including semiconductor nanocrystals (Si, Ge et al.), metal dot (W, Ni, Au, Pt, Ag et al.), dielectric nanocrystals (Al2O3, HfO2 and Si4N3 et al.) and Ge/Si hetero-nanocrystals. In this work, we will report for the first time titanium silicide/Si hetero-nanocrystal floating gate memory