Abstract:The demand for redundant hydraulic manipulators that can implement complex heavy-duty tasks in unstructured areas is increasing; however, current manipulator layouts that remarkably differ from human arms make intuitive kinematic operation challenging to achieve. This study proposes a seven-degree-of-freedom (7-DOF) redundant anthropomorphic hydraulically actuated manipulator with a novel roll-pitch-yaw spherical wrist. A hybrid series-parallel mechanism is presented to achieve the spherical wrist design, which consists of two parallel linear hydraulic cylinders to drive the yaw/pitch 2-DOF wrist plate connected serially to the roll structure. Designed as a 1R P RRR-1S P U mechanism (“R”, “P”, “S”, and “U” denote revolute, prismatic, spherical, and universal joints, respectively; the underlined letter indicates the active joint), the 2-DOF parallel structure is partially decoupled to obtain simple forward/inverse kinematic solutions in which a closed-loop subchain “R P RR” is included. The 7-DOF manipulator is then designed, and its third joint axis goes through the spherical center to obtain closed-form inverse kinematic computation. The analytical inverse kinematic solution is drawn by constructing self-motion manifolds. Finally, a physical prototype is developed, and the kinematic analysis is validated via numerical simulation and test results.

Design and Fabrication of Multi-Degrees-of-freedom Single Crystal Silicon Moveable Platforms on SOI Wafer

The SOI DAWN process for three-dimensional silicon micromachining and its applications

Design And Modeling Of A Hydraulic Soft Actuator With Three Degrees Of Freedom

Integrating SOI and poly-Si surface structures using a monolithic process

Integrating The Soi And Poly-Si Surface Structures In A Monolithic Process For Optical Devices Platform

A Large Out-of-plane Motion Mechanism for Optical Applications

A molded surface-micromachining and bulk etching release (MOSBE) fabrication platform on (1 1 1) Si for MOEMS

Development of a redundant anthropomorphic hydraulically actuated manipulator with a roll-pitch-yaw spherical wrist

Development of an Annular-Shaped Bernoulli Gripper for Contactless Gripping of Large-Size Silicon Wafer

A Novel Flexure-Based 3-DOF Micro-Parallel Manipulator with a Gripper for Micro/nano Manipulation

Complementary Metal Oxide Silicon Integrated Circuits Incorporating Monolithically Integrated Stretchable Wavy Interconnects

A Six-Degree-of-Freedom Compliant Parallel Platform for Optoelectronic Packaging

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

Three-dimensional integration of suspended single-crystalline silicon MEMS arrays with CMOS

Design and Research on Large Displacement Bidirectional MEMS Stage with Interlock Mechanism

A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices

An SOI-based post-fabrication process for compliant MEMS devices

A microplatform for measurement of cell mechanical properties

Design of Two-Dimensional Actuator Based on Silicon Plastic Deformation

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion