Design of Two-Dimensional Actuator Based on Silicon Plastic Deformation

Chen Lin,Li Wei,Ge Xiaohong,Che Lufeng
DOI: https://doi.org/10.3969/j.issn.1003-353x.2011.08.001
2011-01-01
Abstract:A novel two-dimensional actuator based on the plastic deformation was designed and fabricated.The actuator contains a peripheral vertical drive and a internal horizontal drive.The fabrication of actuator was based on Si-Si bonding technology.In order to realize electrically isolate of the vertical drive section and the horizontal drive section,the insulated trench was fabricated on the front side of the silion.Then DIRE etching technology was used to release the structure and vertical offset was accomplished between movable combs and fixed combs by silicon plastic deformation.Finally,the two-dimensional actuator was successfully fabricated with the vertical offset of 19.8 μm between movable combs and fixed combs in vertical drive section of the actuator.
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