A Novel Self-Aligned Electrostatic Vertical Actuator Using Plastic Deformation Technology

Wei Li,Zhaohui Song,Xiaohong Ge,Lufeng Che,Yuelin Wang
DOI: https://doi.org/10.1007/s00542-013-1851-7
2013-01-01
Microsystem Technologies
Abstract:A novel method is presented to fabricate a self-aligned electrostatic vertical actuator using plastic deformation technology. The model of the vertical actuator is proposed and simulated using finite element analysis method. The fixed combs and movable combs, and spring beams are patterned using one mask and fabricated by DRIE technology simultaneously. The fixed combs and movable combs have staggered distance of 21.8 μm in the vertical direction on the condition of self-alignment using plastic deformation technology. The electrostatic vertical actuator has achieved large vertical drive displacement at low voltage. The measurement results show that the maximum drive displacement runs up to 17 μm at 17 V voltage between the fixed combs and movable combs. Experimental results verify the usefulness of the guidelines obtained from simulation and calculation.
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