A Novel Sequential Engagement Electrodes for Vertical Comb-Drive Actuator

Mingching Wu,Hung-Yi Lin,Rongshun Chen,Weileun Fang
DOI: https://doi.org/10.1109/memsys.2007.4432993
2007-01-01
Abstract:This work demonstrated the concept of using "sequential engagement of comb electrodes" to improve the linearity and maximum deflection of vertical comb- drive actuator (VCA). This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment results of VCA with four different electrode-distribution designs demonstrated the feasibility of this study. In comparison, a modified (Reverse curve-distribution) VCA was remarkably improved the performance of conventional (Linear- distribution) VCA. Experiments show that the Reverse curve-distribution VCA improves the nonlinearity for 50% and increases the maximum angular motion for 3.5- fold.
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