Effect of glycine on CMP process of molybdenum

Hui Feng,Li-Ao Cao,Xin-Ping Qu
DOI: https://doi.org/10.1109/ICSICT.2014.7021189
2014-01-01
Abstract:The effect of glycine on CMP of Mo using H2O2 based alkaline slurry is investigated. It is found that both removal rate (RR) and static etch rate(SER)decrease after adding glycine into the alkaline slurry. Higher concentration of glycine results in a lower RR. The in-situ OCP experiment results reveal that after adding glycine into the slurry, the chemical reaction becomes weaker and less amount of oxide forms. The mechanism of glycine's inhibition to CMP of Mo is due to physical adsorption between the glycine molecule and the Mo surface.
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