Dual trench gates SOI LIGBT with low conduction loss

Liu Meihua,Jiang, F.X.C.,Lin Xinnan
DOI: https://doi.org/10.1109/ICSICT.2014.7021687
2014-01-01
Abstract:A dual trench gates SOI LIGBT is proposed to overcome the problems of large forward voltage drop and large on-state conductance in conventional SOI LIGBT. The combination of double gates and deep p-type anode are adopted in the new structure. The dual trench gates structure is employed to enable more electrons to flow into the n- drift layer and improve the latch-up characteristic. Through the optimization of anode parameters, the low forward voltage drop and low loss can be achieved without sacrificing the BV performance. © 2014 IEEE.
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