Study on the valveless micropumps with saw-tooth microchannels

Yinghua Xu,Weiping Yan,Tun Cao,Li Guo
DOI: https://doi.org/10.1109/ICCA.2014.6871102
2014-01-01
Abstract:This paper experimentally demonstrates a saw-tooth diffuser/nozzle valveless micropump. The saw-tooth diffuser/nozzle pipe is fabricated on chrome glass substrate using MEMS technology. A PMMA material is used to manufacture the pump chamber. The vibration of piezoelectric cantilever drives PDMS diagram to do reciprocating motion. It has been shown that the steady flow rate of the saw-tooth diffuser/nozzle pipe increase a 25-percent over the smooth one. A good agreement between the experiments and theoretical analysis based on finite element method is obtained. The best diffused angle λ was determined by the microchannel length L of saw-tooth diffuser/nozzle pipe, and the micro pump operates with its maximum flow rate as soon as the length-width ratio A reached the optimized value. We are believed to be the first to propose the concept of wedge seal method, which can improve the performance of the seal method.
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