Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer

Dongmei XIA,Xuanming PANG,Xiaonan CHEN,Bo LI

DOI: https://doi.org/10.3321/j.issn:0253-987X.2009.07.020

2009-01-01

Abstract:A dielectric elastomer(DE) valveless micropump with plane diffuser/nozzle elements is investigated.The structure of the valveless micropump is designed by analyzing the effects of angle,length,minimum width of the diffuser-nozzle to the diffusivity.Based on UV-LIGA technique,the DE diaphragms and the SU-8 structure are bonded and the valveless micropump is accomplished.A DE diaphragms structure is conformed by experiment to realize the pumping.The maximum flow rate of 21.2 μL/min is achieved under 3 500 V,8 Hz sine wave.The valveless micropump with simple structure and lower cost demonstrates its further application foreground.