Abstract:Femtosecond laser induced periodic surface structures (LIPSSs) have been implemented on various materials. However, its further development in manipulation of optical properties is hindered by the shallow depth. Herein, the paper proposes a novel method of two-step spatial-selective amorphization for producing the deep regular nanogratings on silicon by femtosecond laser and chemical etching with HF acid. In the first step, the spatially periodic amorphization of silicon surface is fabricated by the surface plasmon excitation of the incident femtosecond laser, the chemical etching of which produces the shallow gratings with a period of 765 nm, or so-called prefabricated-LIPSSs (pre-LIPSSs). During the second step, the spatial-selective amorphization of sample takes place by exploiting the local field enhancement of laser irradiation within the grooves. After chemical etching, the deep local field enhancement assisted LIPSSs (LFE-LIPSSs) are formed, with a three-fold larger depth of 155 nm but an invariable period. Comparing with the pre-LIPSSs, the LFE-LIPSSs show 45% increase in anti-reflection performance at around 700 nm and surface-enhanced Raman scattering (SERS) anisotropy ratio is increased about four times with 4-MBA molecules as probe molecules. This work provides a promising approach to fabricate deeper LIPSSs for more effectively controlling the optical properties of materials by femtosecond laser.

Direct Writing of 150 Nm Gratings and Squares on ZnO Crystal in Water by Using 800 Nm Femtosecond Laser

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Simultaneous Formation of Two Types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation

Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

Nanogratings and Nanoholes Fabricated by Direct Femtosecond Laser Writing in Chalcogenide Glasses.

Surface modification of nanostructured ZnS by femtosecond laser pulsing

Fabrication of Complex Nanostructures on ZnO Crystals by the Interference of Three Femtosecond Laser Beams

High Quality Nanogratings Far Beyond Diffraction Limits on Silicon Efficiently Fabricated Using Femtosecond Laser Dual-Beam Interference Direct Writing

Sub-Diffraction Limited Nanogroove Fabrication of 30 Nm Features on Diamond Films Using 800 Nm Femtosecond Laser Irradiation

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Formation of Nanogratings on the Surface of a ZnSe Crystal Irradiated by Femtosecond Laser Pulses

Femtosecond Laser-Induced Subwavelength Ripples Formed by Asymmetrical Grating Splitting

Generation mechanisms of laser-induced periodic nanostructures on surfaces of microgrooves

Deep-subwavelength ripples on the ZnO surface obtained via metal-film-assisted femtosecond laser processing

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Interference Femtosecond Laser Stamping of Micro-Grating Structures and Time-Resolved Observation of Its Dynamics.

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

Periodic Surface Nanostructures on Polycrystalline ZnO Induced by Femtosecond Laser Pulses

Regular Uniform Large-Area Subwavelength Nanogratings Fabricated by the Interference of Two Femtosecond Laser Beams Via Cylindrical Lens

Controllable Formation of Laser-Induced Periodic Surface Structures on ZnO Film by Temporally Shaped Femtosecond Laser Scanning