Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Nanogratings and Nanoholes Fabricated by Direct Femtosecond Laser Writing in Chalcogenide Glasses.

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Femtosecond laser-induced large area of periodic structures on chalcogenide glass via twice laser direct-writing scanning process

Low-threshold Whispering-Gallery-mode Microlasers Fabricated in a Nd:glass Substrate by Three-Dimensional Femtosecond Laser Micromachining.

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses

Direct Writing of 150 Nm Gratings and Squares on ZnO Crystal in Water by Using 800 Nm Femtosecond Laser

Microstructural modification of chalcogenide glasses by femtosecond laser

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

Formation of In-Volume Nanogratings in Glass Induced by Spatiotemporally Focused Femtosecond Laser Pulses

Embedded Nanogratings in Germanium Dioxide Glass Induced by Femtosecond Laser Direct Writing

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Fabrication and characterization of femtosecond laser written waveguides in chalcogenide glass

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Effect of Sodium Oxide Content on the Formation of Nanogratings in Germanate Glass by a Femtosecond Laser

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Simultaneous Formation of Two Types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses

Temperature field simulation of chalcogenide glass ablation by nanosecond pulsed laser-based on pump–probe technology