Chemical Structure Study of SiO2/4H-SiC (0001) Interface Transition Region by Angle-Dependent X-Ray Photoelectron Spectroscopy

Qiaozhi Zhu,Lingqin Huang,Wenbo Li,Shenmin Li,Dejun Wang
DOI: https://doi.org/10.1063/1.3628322
IF: 4
2011-01-01
Applied Physics Letters
Abstract:The chemical structure of SiO2/4H-SiC (0001) interface transition region is investigated using angle-dependent x-ray photoelectron spectroscopy. The relative intensities of various silicon oxycarbides (SiOxCy) components as a function of polar emission angle suggest that SiOC3, SiO2C2, SiO3C, and SiO2 have different depth distributions at the interface. Then a nonabrupt four-layer structure model is proposed. And the relative intensities of various SiOxCy species are fitted based on the model by an electron damping scheme. The well fitted results indicate that the SiO2/4H-SiC (0001) interface transition region can be described by a chemically nonabrupt four-layer structure model well.
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