Micromachined Sandwich Interferometric Accelerometer with Force Feedback Control

WU Kang,YE Xiong-ying,CHEN Feng,LIU Li-tao,ZHOU Zhao-ying

DOI: https://doi.org/10.3969/j.issn.1672-6030.2011.01.005

2011-01-01

Abstract:A micromachined sandwich interferometric accelerometer with force feedback control was designed,which consisted of a sensor chip,a laser diode,a photodiode,driving circuit and detecting circuit with force feedback control.The sensor chip was a glass-silicon-glass sandwich structure,and was fabricated using silicon process and silicon glass anodic-bonding and deep etching release process.A proof mass was suspended by aluminium beams attached to the silicon substrate,and a diffraction grating and electrodes resided under the proof mass.The gap between the mass and the bottom glass could be adjusted through electrostatic actuation.A light beam from the laser diode illuminates the grating on the sensor chip,which reflects the incident beam into several diffraction orders.The intensity of these diffraction orders varies with the gap between the mass and the glass.By measuring the variation of the intensity of the 1st diffraction order,the feedback control circuit changes the force feedback voltage between the mass and the glass so that the gap between them was kept to be odd times an eighth of the incident beam wavelength.Therefore,force feedback control can improve the linearity and sensitivity of the output and extend the detection range.