Instability Of Nitrogen Doped Sb2te3 For Phase Change Memory Application

Xuelai Li,Feng Rao,Zhitang Song,Min Zhu,Weili Liu,Zhimei Sun
DOI: https://doi.org/10.1063/1.3660705
IF: 2.877
2011-01-01
Journal of Applied Physics
Abstract:By means of experimental methods and ab initio total energy calculations, we have studied the stability and properties of nitrogen doped Sb2Te3 (NST). The NST film displayed a higher crystallization temperature and sheet resistance than undoped Sb2Te3 (ST) film. Nevertheless, the sheet resistance of the crystalline NST film unexpectedly increased as the temperature increased when the temperature was above 260 degrees C. The X-ray photoelectron spectroscopy (XPS) showed that the nitrogen concentration and the Sb-N bonds were decreasing as the annealing temperature increased, and no nitrogen existed in the NST when annealed at 300 degrees C for 5 min. Our theoretical calculations showed that the incorporation of nitrogen into crystalline Sb2Te3 was not energetically favorable, and the nitrogen atoms preferred forming chemical bonds with Sb atoms to Te atoms. (C) 2011 American Institute of Physics. [doi:10.1063/1.3660705]
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