Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Femtosecond laser directly writing microholes in Bi(Nb 0.998 V 0.002 )O 4 ceramic and multi-photon induced large scale nanometer wires array

High Throughput Laser Nano Direct Writing Technique

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Laser Direct Writing Using Submicron-Diameter Fibers.

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Periodic Microholes in BiNbO4by Femtosecond Laser Pulses for the Applications of 2D Photonic Crystal Waveguide

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Investigation of femtosecond laser assisted nano and microscale modifications in lithium niobate

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Engraving Depth‐Controlled Nanohole Arrays on Fused Silica by Direct Short‐Pulse Laser Ablation

Three-dimensional femtosecond laser nanolithography of crystals

Femtosecond laser direct writing device and femtosecond laser direct writing method for annular waveguide in transparent materials

Femtosecond laser micromachining and microfabrication in transparent materials

Direct Laser Writing of Complex Microtubes Using Femtosecond Vortex Beams

Ablation characteristics of femtosecond laser on wide band-gap ceramics

Fabrication of large-area microwells on Polydimethylsiloxane films by femtosecond laser ablation

Formation of diversiform microstructures in wide-bandgap materials by tight-focusing femtosecond laser pulses

Near-Field-Regulated Ultrafast Laser Supra-Wavelength Structuring Directly on Ultrahard Metallic Glasses

Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching